Precursor Decomposition, Microstructure, and Porosity of Yttria Stabilized Zirconia Thin Films Prepared by AerosolAssisted Chemical Vapor Deposition
نویسندگان
چکیده
Microstructures of yttria stabilized zirconia thin fi lms deposited by aerosol assisted chemical vapor deposition (AA-CVD) are correlated with the thermal decomposition behavior of the corresponding metal precursors, zirconium and yttrium 2,4-pentanedionate. Process conditions of AA-CVD are investigated with the aim of producing dense and compact YSZ thin fi lms for applications as gas-tight electrolyte. Based on systematic cross sectional scanning transmission electron microscopy (STEM) investigations and conductivity measurements, the development of percolating nanoporosity is observed in samples prepared at temperatures between 350 ° C and 600 ° C at standard solution throughput. Compact columnar thin fi lms with bulk conductivity are obtained at 600 ° C by reducing the metal content of the precursor solution and at 450 ° C by reducing the solution throughput.
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